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WebLithography roadmap on track. Extreme UV lithography (EUVL) and 193 nm immersion lithography enhanced by double-patterning techniques will be sufficient to maintain the lithography roadmap for ... WebAfter 20+ years of development, extreme ultraviolet lithography has become a commercial reality. As I write these words, multi-million dollar machines from A... http://www.lithoguru.com/scientist/lithobasics.html rouhandeh